1. Introduction
Most Vacuum environment with the oil diffusion pump is mixed with residual gas, over 80% of which is the vapor of water and oil. Common pumps cost more time and is less capable of removing the residual gas, influencing the output and quality of the desired products. In this case, water vapor cryopump is the best choice.
Let’s take a close look at how the water vapor cryopump works. First, a refrigerating pipe, which can reach a temperature lower than -120°C, is put in the vacuum cavity or the pumping hole of oil diffusion pump. By its freezing effect, the pipe absorbs the residual gas rapidly and shortens the time of vacuum pumping by 75%. The vacuum degree is improved by half an order of magnitude, reaching 10-8Torr and 10-5Pa. Therefore, the water vapor cryopump is widely used in the fields of vacuum film plating, aerospace industry, health and medical care, etc.
The TH-135°C Water Vapor Cryopump adopts a double-compressor system as well as the overlapping and auto-overlapping cooling down technique. It is equipped with world-famous compressors and freezing accessories. It has the advantages of rapid refrigeration, high efficiency, low cooling temperature, convenient maintenance and so on.
2. Main Features
1. Replacing liquid nitrogen, reducing the cost.
2. With double-compressor refrigeration system, reaching the temperature of -120°C(-
150°C the lowest) within 5 minutes.
3. Adsorbing the water and oil vapor rapidly, shortening the time of air-elimination by
60%~90%
4. Preventing the diffuse of oil from polluting the vacuum cavity
5. Defrosting with hot water, raising and then lowering the temperature swiftly
6. Convenient to install, easy to operate, leaving no exhaust gas
3. Equipment Accessories
Dual Pass Feedthrough: The dual pass feedthrough requires a hole in the vacuum chamber to connect the cryocoil. Custom feedthroughs are available
Cryocoil: The cryocoil will be designed to fit the specific vacuum chamber, based on the information you supply, or you may choose to design and build your own cryocoil
4. Technical data
|
Model |
TH-135-20A |
TH-135-32A |
TH-135-32AX |
TH-135-50A |
TH-135-50AX |
TH-135-80A |
|
Compressor Power (HP) |
9 |
14 |
14 |
18 |
18 |
28 |
|
Working current（A） |
21 |
26.6 |
26.6 |
36.7 |
36.7 |
53 |
|
Power supply |
380 - 440 VAC, 3 ph ,50/60 Hz or 200-230 VAC ,3 ph ,50/60 Hz | |||||
|
Working Temperature（℃） |
-100 ~ -150 | |||||
|
Gas Pump Speed（l/s） |
149000 |
238400 |
238400 |
372500 |
280000 |
596000 |
|
Cooling Power（W）（-100℃） |
2100 |
2800 |
2800 |
3800 |
3800 |
6000 |
|
Cooling pipe Length |
20m,φ16mm |
32m,φ16mm |
Double 16mφ10mm |
50m,φ16mm |
Double 14m,φ16mm |
60m,φ22mm |
|
Cooling Area（㎡） |
1 |
1.6 |
1 |
2.5 |
1.5 |
4 |
|
Cooling type |
Water cooling，water temperature:18℃~30℃，water pressure:2bar~4bar | |||||
|
Cooling water flow（t/h） |
1.8 |
2.5 |
2.5 |
3.2 |
3.2 |
6 |
|
Cooling water connection size（mm） |
16 |
16 |
16 |
19 |
19 |
25 |
|
Pre-cooling time（min） |
30 |
40 | ||||
|
Cooing time(min) |
≤3 |
≤4 |
≤4 |
≤5 |
≤5 |
≤6 |
|
Defrost Time (min) |
≤3 |
≤3 |
≤3 |
≤4 |
≤4 |
≤5 |
|
Re-cooling Time (min) |
≤3 |
≤3 |
≤3 |
≤3 |
≤3 |
≤3 |
|
Oil Pump diameter（mm） |
≤800 |
≤900 |
≤600 |
≤1000 or 2X600 |
≤800 |
≤600 |
|
Vacuum chamber diameter（mm） |
≤1300 |
≤1500 |
≤1000 |
≤1800 |
≤1500 |
≤1200 |
|
Cooling water chiller power（HP） |
7 |
8 |
8 |
10 |
10 |
15 |
